Ventilation Measures to Achieve Cleanliness Requirements

In order to realize the cleanliness level of clean room, there must be comprehensive measures, which include process arrangement, building plan, building construction, building decoration, personnel material purification, air cleanliness measures, maintenance management so on. Among them, the air cleanliness measures are the fundamental guarantee to realize the clean level. In terms of air cleanliness, there are mainly the following specific measures [1] :

(1) The air supply to the clean room must be a very high degree of cleanliness of the air. Therefore, it is necessary to use high-efficiency sub-high-efficiency filters (when the clean level is low) as a terminal filter, the air into the clean room, the last level of filtration. In order to protect the terminal filter prolong its life, the air must be filtered through the medium efficiency filter first.

(2) According to the level of the clean room, reasonable choice of clean room air distribution flow pattern, in the work area should avoid vortex area; try to make the cleanliness of the air sent into the room directly to the work area; air flow is conducive to the particles in the clean room the return air outlet.

(3) Sufficient air volume, both in order to dilute the dust concentration of air, but also to ensure that there is a stable airflow pattern.

(4) Different levels of clean room, clean room non-clean room clean room outdoor should maintain a certain positive pressure value.